Nanoimprint of glass materials with glassy carbon molds fabricated by focused-ion-beam etching

Micro/nano-imprinting or hot embossing is a target of interest for the industrial production of microdevices. In fluidic micro electromechanical systems (MEMS) applications, polymer materials have been employed for their low cost in the fabrication of economical products. However, glasses are much more suitable for higher-temperature applications or use in reactive chemical environments. In optical MEMS as well, glasses are good candidate materials for enhanced optical properties. In this study, micro/nano-imprinting was employed for Pyrex glass and quartz glass molding, and test structures were successfully fabricated with good fidelity for a 10 × 10 × 7 μm microstructure and a 0.3 μm line-and-space pattern with a depth of 0.4 μm.