Modeling and optimal design of multilayer thermal cantilever microactuators

Jianyu Fu; Dapeng Chen; Tianchun Ye; Binbin Jiao; Yi Ou

doi:10.1007/s11431-008-0340-1

Modeling and optimal design of multilayer thermal cantilever microactuators

Jianyu Fu
, Dapeng Chen
, Tianchun Ye
, Binbin Jiao
, Yi Ou

CAS - Institute of Microelectronics

科研成果: 期刊稿件 › 文章 › 同行评审

8 引用（Scopus）

摘要

A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived. The simplified expression received from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters. Experiment is performed, the modeled and experimental results demonstrate the validity of the model, and it also indicates that Young's module makes great contribution to the deflection; therefore, thin layers cannot be ignored arbitrarily.

源语言	英语
页（从-至）	1167-1170
页数	4
期刊	Science in China, Series E: Technological Sciences
卷	52
期	5
DOI	https://doi.org/10.1007/s11431-008-0340-1
出版状态	已出版 - 5月 2009
已对外发布	是

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abstract = "A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived. The simplified expression received from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters. Experiment is performed, the modeled and experimental results demonstrate the validity of the model, and it also indicates that Young's module makes great contribution to the deflection; therefore, thin layers cannot be ignored arbitrarily.",

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AU - Ou, Yi

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KW - Optimization

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KW - Tip deflection

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Modeling and optimal design of multilayer thermal cantilever microactuators

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