Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

M. Miyake; J. F. Scott; X. J. Lou; F. D. Morrison; S. Motoyama; T. Tatsuta; O. Tsuji

doi:10.1109/ISAF.2007.4393160

Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

M. Miyake
, J. F. Scott
, X. J. Lou
, F. D. Morrison
, S. Motoyama
, T. Tatsuta
, O. Tsuji

University of Cambridge
Samco Inc.
University of St Andrews

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

1 引用（Scopus）

摘要

Pb(Zr,Ti)O₃ (PZT) thin films and nanotube were prepared on SiO₂/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm ². The step coverage was 59% on the side wall and 79% on the bottom wall.

源语言	英语
主期刊名	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
页	38-40
页数	3
DOI	https://doi.org/10.1109/ISAF.2007.4393160
出版状态	已出版 - 2007
已对外发布	是
活动	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, 日本期限: 27 5月 2007 → 31 5月 2007

出版系列

姓名	IEEE International Symposium on Applications of Ferroelectrics

会议

会议	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
国家/地区	日本
市	Nara-city
时期	27/05/07 → 31/05/07

访问文件

10.1109/ISAF.2007.4393160

其它文件与链接

链接到 Scopus 的出版物

引用此

Miyake, M., Scott, J. F., Lou, X. J., Morrison, F. D., Motoyama, S., Tatsuta, T., & Tsuji, O. (2007). Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. 在 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (页码 38-40). 文章 4393160 (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393160

@inproceedings{2f5e07bade804f5ea9ca7f4cf25c08ad,

title = "Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes",

abstract = "Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm 2. The step coverage was 59\% on the side wall and 79\% on the bottom wall.",

author = "M. Miyake and Scott, \{J. F.\} and Lou, \{X. J.\} and Morrison, \{F. D.\} and S. Motoyama and T. Tatsuta and O. Tsuji",

year = "2007",

doi = "10.1109/ISAF.2007.4393160",

language = "英语",

isbn = "1424413338",

series = "IEEE International Symposium on Applications of Ferroelectrics",

pages = "38--40",

booktitle = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF",

note = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF ; Conference date: 27-05-2007 Through 31-05-2007",

}

Miyake, M, Scott, JF, Lou, XJ, Morrison, FD, Motoyama, S, Tatsuta, T & Tsuji, O 2007, Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. 在 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393160, IEEE International Symposium on Applications of Ferroelectrics, 页码 38-40, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, 日本, 27/05/07. https://doi.org/10.1109/ISAF.2007.4393160

Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. / Miyake, M.; Scott, J. F.; Lou, X. J. 等.
2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. 页码 38-40 4393160 (IEEE International Symposium on Applications of Ferroelectrics).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

AU - Miyake, M.

AU - Scott, J. F.

AU - Lou, X. J.

AU - Morrison, F. D.

AU - Motoyama, S.

AU - Tatsuta, T.

AU - Tsuji, O.

PY - 2007

Y1 - 2007

N2 - Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm 2. The step coverage was 59% on the side wall and 79% on the bottom wall.

AB - Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700°C exhibit good ferroelectric properties with remanent polarisation of ca. 15 μC/cm 2. The step coverage was 59% on the side wall and 79% on the bottom wall.

UR - https://www.scopus.com/pages/publications/51349146669

U2 - 10.1109/ISAF.2007.4393160

DO - 10.1109/ISAF.2007.4393160

M3 - 会议稿件

AN - SCOPUS:51349146669

SN - 1424413338

SN - 9781424413331

T3 - IEEE International Symposium on Applications of Ferroelectrics

SP - 38

EP - 40

BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

Y2 - 27 May 2007 through 31 May 2007

ER -

Miyake M, Scott JF, Lou XJ, Morrison FD, Motoyama S, Tatsuta T 等. Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes. 在 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. 页码 38-40. 4393160. (IEEE International Symposium on Applications of Ferroelectrics). doi: 10.1109/ISAF.2007.4393160

Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

摘要

出版系列

会议

访问文件

其它文件与链接

学术指纹

引用此