@article{19bbb34d0f294f9fa26a70198c772971,
title = "Microforming: Key Technology for the Age of China Shift",
keywords = "LIGA, commercialization of MEMS, dry etching, high aspect ratio structuring, hot embossing, optical MEMS",
author = "Ryutaro Maeda",
year = "2003",
doi = "10.2493/jjspe.69.1061",
language = "英语",
volume = "69",
pages = "1061--1064",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "8",
}