Micro-Fabrication Technology for Piezoelectric Film Formationand its Application to MEMS

Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application fields of MEMS, such as scanning mirror. Internal stress is estimated and analyzed for the improvement of device performance. Keywords : micro fabrication technology, micro electro mechanical system(MEMS), lead zirconate titanate(PZT), actuator, optical scanner, internal stress.