Micro-fabrication of flexible coils with copper filled through polymer via structures

Q. S. Zhu; A. Toda; Y. Zhang; T. Itoh; R. Maeda

doi:10.1088/1742-6596/476/1/012032

Micro-fabrication of flexible coils with copper filled through polymer via structures

Q. S. Zhu
, A. Toda
, Y. Zhang
, T. Itoh
, R. Maeda

NMEMS Technology Research Organization
National Institute of Advanced Industrial Science and Technology
Meltex Inc.

科研成果: 期刊稿件 › 会议文章 › 同行评审

2 引用（Scopus）

摘要

In this work, we present one flexible 3D micro-coil. This 3D micro-coil is successfully prepared in a thin polymer film with a thickness of 120μm. The flexible coil is expected to be used in current sensing and energy harvesting MEMS those require a large deformation degree to wrap target object. A typical micro-machined 3D coil is composed of bottom, vertical and top windings. We firstly adopt through polymer vias (TPVs) and metal filling technology to fabricate the vertical windings. A high-speed copper electrodeposition technology of TPVs is developed to obtain void-free vertical windings.

源语言	英语
期刊论文编号	012032
期刊	Journal of Physics: Conference Series
卷	476
期	1
DOI	https://doi.org/10.1088/1742-6596/476/1/012032
出版状态	已出版 - 2013
已对外发布	是
活动	13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2013 - London, 英国期限: 3 12月 2013 → 6 12月 2013

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@article{c48d5b5df92a4a5aabfae967452bf53b,

title = "Micro-fabrication of flexible coils with copper filled through polymer via structures",

abstract = "In this work, we present one flexible 3D micro-coil. This 3D micro-coil is successfully prepared in a thin polymer film with a thickness of 120μm. The flexible coil is expected to be used in current sensing and energy harvesting MEMS those require a large deformation degree to wrap target object. A typical micro-machined 3D coil is composed of bottom, vertical and top windings. We firstly adopt through polymer vias (TPVs) and metal filling technology to fabricate the vertical windings. A high-speed copper electrodeposition technology of TPVs is developed to obtain void-free vertical windings.",

author = "Zhu, \{Q. S.\} and A. Toda and Y. Zhang and T. Itoh and R. Maeda",

year = "2013",

doi = "10.1088/1742-6596/476/1/012032",

language = "英语",

volume = "476",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

number = "1",

note = "13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2013 ; Conference date: 03-12-2013 Through 06-12-2013",

}

TY - JOUR

T1 - Micro-fabrication of flexible coils with copper filled through polymer via structures

AU - Zhu, Q. S.

AU - Toda, A.

AU - Zhang, Y.

AU - Itoh, T.

AU - Maeda, R.

PY - 2013

Y1 - 2013

N2 - In this work, we present one flexible 3D micro-coil. This 3D micro-coil is successfully prepared in a thin polymer film with a thickness of 120μm. The flexible coil is expected to be used in current sensing and energy harvesting MEMS those require a large deformation degree to wrap target object. A typical micro-machined 3D coil is composed of bottom, vertical and top windings. We firstly adopt through polymer vias (TPVs) and metal filling technology to fabricate the vertical windings. A high-speed copper electrodeposition technology of TPVs is developed to obtain void-free vertical windings.

AB - In this work, we present one flexible 3D micro-coil. This 3D micro-coil is successfully prepared in a thin polymer film with a thickness of 120μm. The flexible coil is expected to be used in current sensing and energy harvesting MEMS those require a large deformation degree to wrap target object. A typical micro-machined 3D coil is composed of bottom, vertical and top windings. We firstly adopt through polymer vias (TPVs) and metal filling technology to fabricate the vertical windings. A high-speed copper electrodeposition technology of TPVs is developed to obtain void-free vertical windings.

UR - https://www.scopus.com/pages/publications/84891806461

U2 - 10.1088/1742-6596/476/1/012032

DO - 10.1088/1742-6596/476/1/012032

M3 - 会议文章

AN - SCOPUS:84891806461

SN - 1742-6588

VL - 476

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012032

T2 - 13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2013

Y2 - 3 December 2013 through 6 December 2013

ER -

Micro-fabrication of flexible coils with copper filled through polymer via structures

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