@inproceedings{1dacd3c36a0a437da42f5a84aca78daa,
title = "Micro disk resonator with on-disk piezoelectric thin film transducers for integrated MEMS ubiquitous applications",
abstract = "The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power consumption. By optimizing the size, location of the PZT-electrode stacks, and the layout of the silicon disk to compress energy dissipation, dramatically improved quality-factor (Q-factor) was achieved both in air (Q=1319) and under reduced pressure (Q=5028 at the pressure of 300Pa).",
keywords = "MEMS, PZT, disk resonator, piezoelectric transducer, quality-factor, wireless sensor network",
author = "J. Lu and Y. Zhang and T. Itoh and R. Maeda",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969669",
language = "英语",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "514--517",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}