MEMS/CMOS compatible gas sensors based on spectroscopy analysis

Chaoqun Gao; Binbin Jiao; Maozhe Liu; Quanbao Li; Kai Yang; Shali Shi; Zhigang Li; Yi Ou; Yupeng Jing; Dapeng Chen

MEMS/CMOS compatible gas sensors based on spectroscopy analysis

Chaoqun Gao
, Binbin Jiao
, Maozhe Liu
, Quanbao Li
, Kai Yang
, Shali Shi
, Zhigang Li
, Yi Ou
, Yupeng Jing
, Dapeng Chen

CAS - Institute of Microelectronics

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis, which is fabricated on a (110) silicon wafer, is proposed. Its main principle, structure, and fabrications are introduced in detail. The gas sensor gains high sensitivity and selectivity but has low power consumption, and it should detect the grads of gas concentration for the mentioned advantages.

源语言	英语
页（从-至）	2043-2049
页数	7
期刊	Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors
卷	29
期	10
出版状态	已出版 - 10月 2008
已对外发布	是

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引用此

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title = "MEMS/CMOS compatible gas sensors based on spectroscopy analysis",

abstract = "A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis, which is fabricated on a (110) silicon wafer, is proposed. Its main principle, structure, and fabrications are introduced in detail. The gas sensor gains high sensitivity and selectivity but has low power consumption, and it should detect the grads of gas concentration for the mentioned advantages.",

keywords = "Gas sensor, MEMS, Spectroscopy analysis",

author = "Chaoqun Gao and Binbin Jiao and Maozhe Liu and Quanbao Li and Kai Yang and Shali Shi and Zhigang Li and Yi Ou and Yupeng Jing and Dapeng Chen",

year = "2008",

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language = "英语",

volume = "29",

pages = "2043--2049",

journal = "Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors",

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TY - JOUR

T1 - MEMS/CMOS compatible gas sensors based on spectroscopy analysis

AU - Gao, Chaoqun

AU - Jiao, Binbin

AU - Liu, Maozhe

AU - Li, Quanbao

AU - Yang, Kai

AU - Shi, Shali

AU - Li, Zhigang

AU - Ou, Yi

AU - Jing, Yupeng

AU - Chen, Dapeng

PY - 2008/10

Y1 - 2008/10

N2 - A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis, which is fabricated on a (110) silicon wafer, is proposed. Its main principle, structure, and fabrications are introduced in detail. The gas sensor gains high sensitivity and selectivity but has low power consumption, and it should detect the grads of gas concentration for the mentioned advantages.

AB - A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis, which is fabricated on a (110) silicon wafer, is proposed. Its main principle, structure, and fabrications are introduced in detail. The gas sensor gains high sensitivity and selectivity but has low power consumption, and it should detect the grads of gas concentration for the mentioned advantages.

KW - Gas sensor

KW - MEMS

KW - Spectroscopy analysis

UR - https://www.scopus.com/pages/publications/55949133517

M3 - 文章

AN - SCOPUS:55949133517

SN - 0253-4177

VL - 29

SP - 2043

EP - 2049

JO - Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

JF - Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

IS - 10

ER -

MEMS/CMOS compatible gas sensors based on spectroscopy analysis

摘要

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