TY - GEN
T1 - MEMS-based X-ray optics for future astronomical missions
AU - Ezoe, Yuichiro
AU - Mitsuishi, Ikuyuki
AU - Ishizu, Kensuke
AU - Moriyama, Teppei
AU - Mitsuda, Kazuhisa
AU - Yamasaki, Noriko Y.
AU - Ohashi, Takaya
AU - Horade, Mitsuhiro
AU - Sugiyama, Susumu
AU - Riveros, Raul E.
AU - Boggs, Taylor
AU - Yamaguchi, Hitomi
AU - Kanamori, Yoshiaki
AU - Gabriel, Nicholas T.
AU - Talghader, Joseph J.
AU - Morishita, Kohei
AU - Nakajima, Kazuo
AU - Maeda, Ryutaro
PY - 2010
Y1 - 2010
N2 - X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two or four such wafers are bent to spherical shapes with different curvature of radii and stacked, to focus parallel X-rays from astronomical objects by multiple reflections. In this paper, the concept and recent advances of the MEMS X-ray optics are reviewed.
AB - X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two or four such wafers are bent to spherical shapes with different curvature of radii and stacked, to focus parallel X-rays from astronomical objects by multiple reflections. In this paper, the concept and recent advances of the MEMS X-ray optics are reviewed.
UR - https://www.scopus.com/pages/publications/78751529251
U2 - 10.1109/OMEMS.2010.5672121
DO - 10.1109/OMEMS.2010.5672121
M3 - 会议稿件
AN - SCOPUS:78751529251
SN - 9781424489251
T3 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
SP - 191
EP - 192
BT - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
T2 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Y2 - 9 August 2010 through 12 August 2010
ER -