Mechanical lithography - State of the art and the future

Ryutaro Maeda; Kiwamu Ashida

doi:10.2493/jjspe.70.1219

Mechanical lithography - State of the art and the future

Ryutaro Maeda
, Kiwamu Ashida

仪器科学与技术学院

科研成果: 期刊稿件 › 文章 › 同行评审

4 引用（Scopus）

源语言	英语
页（从-至）	1219-1222
页数	4
期刊	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
卷	70
期	10
DOI	https://doi.org/10.2493/jjspe.70.1219
出版状态	已出版 - 10月 2004

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10.2493/jjspe.70.1219

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引用此

@article{5b81ffe8a77f42e88f51738d10d57ae6,

title = "Mechanical lithography - State of the art and the future",

keywords = "Cantilever array, Mechanical lithography, Nanoimprinting, SPM",

author = "Ryutaro Maeda and Kiwamu Ashida",

year = "2004",

month = oct,

doi = "10.2493/jjspe.70.1219",

language = "英语",

volume = "70",

pages = "1219--1222",

journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",

issn = "0912-0289",

publisher = "Japan Society for Precision Engineering",

number = "10",

}

TY - JOUR

T1 - Mechanical lithography - State of the art and the future

AU - Maeda, Ryutaro

AU - Ashida, Kiwamu

PY - 2004/10

Y1 - 2004/10

KW - Cantilever array

KW - Mechanical lithography

KW - Nanoimprinting

KW - SPM

UR - https://www.scopus.com/pages/publications/34247558455

U2 - 10.2493/jjspe.70.1219

DO - 10.2493/jjspe.70.1219

M3 - 文章

AN - SCOPUS:34247558455

SN - 0912-0289

VL - 70

SP - 1219

EP - 1222

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

IS - 10

ER -