@inproceedings{f4561b62b5864b169736952c3b78a088,
title = "Mechanical characterization of nanowires by planar vibration sensor",
abstract = "Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanical devices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we are engaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration sensor fabricated with less process cost and package difficulties. Theoretical analysis and simulation results suggested that the device is capable of high-sensitive and variety, and it is expected to evaluate mechanical properties of metallic or metallic oxide nanowires.",
keywords = "MEMS, Mechanical Property, Nanowire, Planar Vibration Sensor",
author = "L. Zhang and J. Lu and H. Takagi and R. Maeda",
year = "2013",
doi = "10.1109/NEMS.2013.6559696",
language = "英语",
isbn = "9781467363525",
series = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",
pages = "124--127",
booktitle = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",
note = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 ; Conference date: 07-04-2013 Through 10-04-2013",
}