@inproceedings{448e50f3addf4a57b3902e462cdd1f78,
title = "Measuring subsurface damage of the ground sample by roughness along the bevel",
abstract = "This paper presents a method of measuring subsurface damage by roughness variation along the bevel surface, which is prepared by MRF taper polishing. Experiments for the ground K9 glass samples show that roughness varies obviously at the position where the subsurface damages go to disappear. Discussions indicate that the method is quantitative and simple for measuring subsurface damage.",
keywords = "MRF taper polishing, Optical element fabrication, Roughness of surface, Subsurface damage",
author = "Hairong Wang and Guoliang Sun and Cheng Guan and Can Chen and Zhuangde Jiang",
year = "2011",
doi = "10.4028/www.scientific.net/MSF.694.809",
language = "英语",
isbn = "9783037852101",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "809--814",
booktitle = "Frontier of Nanoscience and Technology",
}