Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method

A simple and efficient technique for large-area manufacturing of concave microlens arrays (MLAs) on silica glasses with femtosecond (fs)- laser-enhanced chemical wet etching is demonstrated. By means of fs laser in situ irradiations followed by the hydrofluoric acid etching process, large area close-packed rectangular and hexagonal concave MLAs with diameters less than a hundred of micrometers are fabricated within a few hours. The fabricated MLAs exhibit excellent surface quality and uniformity. In contrast to the classic thermal reflow process, the presented technique is a maskless process and allows the flexible control of the size, shape and the packing pattern of the MLAs by adjusting the parameters such as the pulse energy, the number of shots and etching time.