Mask deduction for surface micromachining to support top-down design flow

Zheng Liu; Pingyu Jiang

Mask deduction for surface micromachining to support top-down design flow

Zheng Liu
, Pingyu Jiang

机械工程学院

Xi'an Jiaotong University

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

Based on surface micromachining process, the rough mask information is obtained by means of the operation on geometric elements among the layer models. The precise mask then is formed by revising the rough mask based on the process restrictions. Together with the reconstruction of the process model, the mask revision resolves the problem of multiple-layer etching and improves the manufacturability. The CAPP and CAD modules for micro devices are integrated coordinately to get an optimized design model and mask set.

源语言	英语
页（从-至）	798-803
页数	6
期刊	Jisuanji Fuzhu Sheji Yu Tuxingxue Xuebao/Journal of Computer-Aided Design and Computer Graphics
卷	19
期	6
出版状态	已出版 - 6月 2007

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引用此

@article{352ef2155364438eb8982d880b01c2e9,

title = "Mask deduction for surface micromachining to support top-down design flow",

abstract = "Based on surface micromachining process, the rough mask information is obtained by means of the operation on geometric elements among the layer models. The precise mask then is formed by revising the rough mask based on the process restrictions. Together with the reconstruction of the process model, the mask revision resolves the problem of multiple-layer etching and improves the manufacturability. The CAPP and CAD modules for micro devices are integrated coordinately to get an optimized design model and mask set.",

keywords = "Mask deduction, Micro device, Process model, Surface micromachining, Top-Down",

author = "Zheng Liu and Pingyu Jiang",

year = "2007",

month = jun,

language = "英语",

volume = "19",

pages = "798--803",

journal = "Jisuanji Fuzhu Sheji Yu Tuxingxue Xuebao/Journal of Computer-Aided Design and Computer Graphics",

issn = "1003-9775",

publisher = "Institute of Computing Technology",

number = "6",

}

TY - JOUR

T1 - Mask deduction for surface micromachining to support top-down design flow

AU - Liu, Zheng

AU - Jiang, Pingyu

PY - 2007/6

Y1 - 2007/6

N2 - Based on surface micromachining process, the rough mask information is obtained by means of the operation on geometric elements among the layer models. The precise mask then is formed by revising the rough mask based on the process restrictions. Together with the reconstruction of the process model, the mask revision resolves the problem of multiple-layer etching and improves the manufacturability. The CAPP and CAD modules for micro devices are integrated coordinately to get an optimized design model and mask set.

AB - Based on surface micromachining process, the rough mask information is obtained by means of the operation on geometric elements among the layer models. The precise mask then is formed by revising the rough mask based on the process restrictions. Together with the reconstruction of the process model, the mask revision resolves the problem of multiple-layer etching and improves the manufacturability. The CAPP and CAD modules for micro devices are integrated coordinately to get an optimized design model and mask set.

KW - Mask deduction

KW - Micro device

KW - Process model

KW - Surface micromachining

KW - Top-Down

UR - https://www.scopus.com/pages/publications/34347269650

M3 - 文章

AN - SCOPUS:34347269650

SN - 1003-9775

VL - 19

SP - 798

EP - 803

JO - Jisuanji Fuzhu Sheji Yu Tuxingxue Xuebao/Journal of Computer-Aided Design and Computer Graphics

JF - Jisuanji Fuzhu Sheji Yu Tuxingxue Xuebao/Journal of Computer-Aided Design and Computer Graphics

IS - 6

ER -

Mask deduction for surface micromachining to support top-down design flow

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