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Local field enhancement characteristics in a tapered metal-coated optical fiber probe for nanolithography

  • Harbin Institute of Technology

科研成果: 期刊稿件文章同行评审

28 引用 (Scopus)

摘要

In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.

源语言英语
页(从-至)90-97
页数8
期刊Integrated Ferroelectrics
164
1
DOI
出版状态已出版 - 2015

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