摘要
In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 90-97 |
| 页数 | 8 |
| 期刊 | Integrated Ferroelectrics |
| 卷 | 164 |
| 期 | 1 |
| DOI | |
| 出版状态 | 已出版 - 2015 |
学术指纹
探究 'Local field enhancement characteristics in a tapered metal-coated optical fiber probe for nanolithography' 的科研主题。它们共同构成独一无二的指纹。引用此
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