Liquid microlens compound structure for enhanced sub-micron resolution imaging and accelerated reconfigurable deformation manipulation

The optical observation of sub-micron structures encounters significant challenges due to the inadequate spatial shape matching of optical devices and the limitations imposed by diffraction. These factors result in suboptimal imaging resolution and the introduction of defocus distortion. One approach to mitigating these limitations involves utilizing a liquid microlens (LML) assisted microscope, which offers real-time and localized control capabilities. However, the dynamic tuning of LML is subject to volatility and instability, adversely affecting sub-micron resolution imaging. To address this issue, a contour-following coating inspired by the natural cornea is applied to the droplet's surface, resulting in the formation of liquid microlens compound structures (LMLCS). Firstly, photoresist microholes are fabricated on the optical disc. Then, liquid self-assembly technology is used to fill glycerol in the microholes. At last, a conformal spreading method of UV-curable adhesive precursor film is developed to ensure the combination of the microlens bilayer structure. Through the application of optical information transmission theory, finite difference time domain (FDTD) method, and the principle of Abbe microscopic imaging, the imaging magnification process and sub-micron resolution characteristic of the LMLCS are revealed. Remarkably, the obtained focal width at half maximum (FWHM) of 1.54 μm is smaller than the theoretical value, enabling reconfigurable sub-micron resolution observation and 1.63 times imaging magnification of 226 nm grating lines under the optical microscope. Compared with unencapsulated LML, this compound structure exhibits better sub-micron resolution capability, greater imaging magnification, and faster adaptive dynamic response characteristics. Consequently, the LMLCS introduces exciting prospects for exploring optical sub-micron measurement and sensing devices with exceptional performance.