TY - GEN
T1 - Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films
AU - Kobayashi, T.
AU - Makimoto, N.
AU - Oikawa, T.
AU - Wada, A.
AU - Funakubo, H.
AU - Maeda, R.
PY - 2013
Y1 - 2013
N2 - We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm 2, 20 V, and -42 pm/V by applying AC voltage of 80 V as 'wakeup' treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.
AB - We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm 2, 20 V, and -42 pm/V by applying AC voltage of 80 V as 'wakeup' treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.
UR - https://www.scopus.com/pages/publications/84875479950
U2 - 10.1109/MEMSYS.2013.6474266
DO - 10.1109/MEMSYS.2013.6474266
M3 - 会议稿件
AN - SCOPUS:84875479950
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 413
EP - 416
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -