Laser-manufactured mirrors for geometrical output coupling of intracavity-generated high harmonics

Dominik Esser; Johannes Weitenberg; Wiebke Bröring; Ioachim Pupeza; Simon Holzberger; Hans Dieter Hoffmann

doi:10.1364/OE.21.026797

Laser-manufactured mirrors for geometrical output coupling of intracavity-generated high harmonics

Dominik Esser
, Johannes Weitenberg
, Wiebke Bröring
, Ioachim Pupeza
, Simon Holzberger
, Hans Dieter Hoffmann

Fraunhofer Institute for Laser Technology
RWTH Aachen University
Max Planck Institute of Quantum Optics

科研成果: 期刊稿件 › 文章 › 同行评审

15 引用（Scopus）

摘要

We demonstrate micro structuring of fused-silica laser mirror substrates by Inverse Laser Drilling. Slits of a width down to ~80 μm and circular holes with diameters down to ∼50 μm have been structured into quarter-inch thick substrates. Except for chipping, the surface areas around these openings have not been irreversibly affected by the manufacturing process. The micro structured mirrors can be used for geometrical output coupling of coherent EUV radiation from cavity-enhanced high harmonic generation.

源语言	英语
页（从-至）	26797-26805
页数	9
期刊	Optics Express
卷	21
期	22
DOI	https://doi.org/10.1364/OE.21.026797
出版状态	已出版 - 4 11月 2013
已对外发布	是

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abstract = "We demonstrate micro structuring of fused-silica laser mirror substrates by Inverse Laser Drilling. Slits of a width down to \textasciitilde{}80 μm and circular holes with diameters down to ∼50 μm have been structured into quarter-inch thick substrates. Except for chipping, the surface areas around these openings have not been irreversibly affected by the manufacturing process. The micro structured mirrors can be used for geometrical output coupling of coherent EUV radiation from cavity-enhanced high harmonic generation.",

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AU - Esser, Dominik

AU - Weitenberg, Johannes

AU - Bröring, Wiebke

AU - Pupeza, Ioachim

AU - Holzberger, Simon

AU - Hoffmann, Hans Dieter

PY - 2013/11/4

Y1 - 2013/11/4

N2 - We demonstrate micro structuring of fused-silica laser mirror substrates by Inverse Laser Drilling. Slits of a width down to ~80 μm and circular holes with diameters down to ∼50 μm have been structured into quarter-inch thick substrates. Except for chipping, the surface areas around these openings have not been irreversibly affected by the manufacturing process. The micro structured mirrors can be used for geometrical output coupling of coherent EUV radiation from cavity-enhanced high harmonic generation.

AB - We demonstrate micro structuring of fused-silica laser mirror substrates by Inverse Laser Drilling. Slits of a width down to ~80 μm and circular holes with diameters down to ∼50 μm have been structured into quarter-inch thick substrates. Except for chipping, the surface areas around these openings have not been irreversibly affected by the manufacturing process. The micro structured mirrors can be used for geometrical output coupling of coherent EUV radiation from cavity-enhanced high harmonic generation.

UR - https://www.scopus.com/pages/publications/84887501668

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DO - 10.1364/OE.21.026797

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Laser-manufactured mirrors for geometrical output coupling of intracavity-generated high harmonics

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