Investigation on the displacement fluctuation of the linear motor feed system considering the linear encoder vibration

Optical linear encoder is generally adopted to realize the full-closed loop control for the linear motor feed system. Its reading head installed on the worktable may vibrate as a result of the excitation of disturbance harmonics, which leads to the encoder's error. This study aims to investigate the mechanism of displacement fluctuation due to the encoder's error caused by the worktable vibration in the linear motor feed system. The vibrating modes of feed system are analyzed firstly, and then the influences of three torsional vibrations on encoder's errors are investigated. The transfer function between disturbance and output response is proposed to analyze the influence of encoder's error on the displacement fluctuation. The relationships among vibration, encoder's error, thrust harmonic and displacement fluctuation are discussed in detail. The results show that the encoder's error can produce obvious displacement fluctuation for the linear motor feed system, which is actually an electromechanical coupling process due to the direct drive and full-closed loop control. Finally, three effective measures are put forward to diminish the system displacement fluctuation.