@inproceedings{5f611badd339435aae005ccfb0032456,
title = "Investigation of mass sensitivity for the piezoelectric diaphragm biosensor",
abstract = "The mass sensitivity of a piezoelectric diaphragm biosensor has been investigated. The piezoelectric diaphragm utilizing a flexural vibration mode is an acoustic wave device which can be immobilized with a bio-molecular recognition layer on its surface. The mass sensitivity of the sensor was analyzed by the approximately theoretical and FEM methods, respectively. The sensitivity formula expressed by the structural parameters and the material parameter was educed for easy computing. The procedure utilizing Rayleigh method for the analytic solution of the sensitivity was introduced. The expression was verified by using a commercial FEM software package, ANSYS. The simulations are well consistent with the theory.",
keywords = "Biosensor, FEM, MEMS, Mass sensitivity, Piezoelectric diaphragm",
author = "Shaokang Li and Wei Ren and Xiaofeng Chen and Xi Yao",
year = "2012",
doi = "10.4028/www.scientific.net/AMR.411.245",
language = "英语",
isbn = "9783037853184",
series = "Advanced Materials Research",
pages = "245--249",
booktitle = "Precision Engineering and Non-Traditional Machining, PENTM 2011",
note = "2011 International Conference on Precision Engineering and Non-Traditional Machining, PENTM 2011 ; Conference date: 09-12-2011 Through 11-12-2011",
}