Integration design of MEMS electro-thermal safety-and-arming devices

The design, fabrication and test of electro-thermal safety-and-arming (SA) device are investigated. The device contains movable structure (comprised by 4 electro-thermal actuators) and propellant cavity. In order to enhance the reliability of SA device, interlock mechanisms are introduced. With proper driven voltages, the device can commute from safe mode to arming mode in 16 ms and generate sufficient space for propellant explosion. The maximum displacement of the device is 402.18 μm with 97.92 mJ (6.12 W during 16 ms) power consumption. silicon-on-insulator wafer and inductively-coupled-plasma are introduced in fabricate process and the chip size is minimized into 8 mm × 8 mm × 0.5 mm successfully.