@inproceedings{a91352107a684083b45e1335d82aa2f1,
title = "Infrared camera based on optical-readout bi-material FPA",
abstract = "With the trend of developments of infrared-focal plane array (FPA) which is particularly pronounced in many applications, in this paper, we demonstrated an uncooled infrared (8∼14μm) camera based on the optically read-out Bi-material Infrared FPA. We reported on the fabrication and characterization of arrays of bimaterial microcantilevers. On the basis of opto-mechanical effect and micro electromechanical system (MEMS) technology, a substrate-free FPA with the thermal isolated structure SiNx and Au for uncooled infrared imaging is developed, with 49.5μmx49.5μm of the pixel and 240x240 array, moreover, the camera had an average noise equivalent temperature difference (NETD) and a response time of 100mK and 100ms at 7Pa atmospheric pressure, respectively.",
keywords = "Focal Plane Arrays (FPA), Infrared (IR), bi-material, camera, optical-readout system, uncooled",
author = "Kong, \{Yan Mei\} and Liu, \{Rui Wen\} and Jiao, \{Bin Bin\} and Chen, \{Da Peng\}",
year = "2011",
doi = "10.1117/12.899491",
language = "英语",
isbn = "9780819488343",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "International Symposium on Photoelectronic Detection and Imaging 2011",
note = "International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications ; Conference date: 24-05-2011 Through 24-05-2011",
}