Influence of bipolar pulse poling technique for piezoelectric vibration energy harvesters using Pb(Zr,Ti)O3 films on 200 mm SOI wafers

N. Moriwaki; T. Kobayashi; Y. Suzuki; N. Makimoto; K. Fujimoto; K. Suzuki; T. Itoh; R. Maeda

doi:10.1088/1742-6596/476/1/012132

Influence of bipolar pulse poling technique for piezoelectric vibration energy harvesters using Pb(Zr,Ti)O₃ films on 200 mm SOI wafers

N. Moriwaki
, T. Kobayashi
, Y. Suzuki
, N. Makimoto
, K. Fujimoto
, K. Suzuki
, T. Itoh
, R. Maeda

Dai Nippon Printing Co., Ltd.
NMEMS Technology Research Organization
Ibaraki University
National Institute of Advanced Industrial Science and Technology

科研成果: 期刊稿件 › 会议文章 › 同行评审

1 引用（Scopus）

摘要

Piezoelectric vibration energy harvester arrays using Pb(Zr,Ti)O ₃ thin films on 200 mm SOI wafers were fabricated. In-plane distribution of influence of bipolar pulse poling technique on direct current (DC) power output from the harvesters was investigated. The results indicate that combination poling treatment of DC and bipolar pulse poling increases a piezoelectric property and reduces a dielectric constant. It means that this poling technique improves the figure of merit of sensors and harvesters. Maximum DC power from a harvester treated by DC poling after bipolar pulse poling is about five times larger than a one treated by DC poling only.

源语言	英语
期刊论文编号	012132
期刊	Journal of Physics: Conference Series
卷	476
期	1
DOI	https://doi.org/10.1088/1742-6596/476/1/012132
出版状态	已出版 - 2013
已对外发布	是
活动	13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2013 - London, 英国期限: 3 12月 2013 → 6 12月 2013

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10.1088/1742-6596/476/1/012132

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@article{bdfb242168b346ec89800959494890f4,

title = "Influence of bipolar pulse poling technique for piezoelectric vibration energy harvesters using Pb(Zr,Ti)O3 films on 200 mm SOI wafers",

abstract = "Piezoelectric vibration energy harvester arrays using Pb(Zr,Ti)O 3 thin films on 200 mm SOI wafers were fabricated. In-plane distribution of influence of bipolar pulse poling technique on direct current (DC) power output from the harvesters was investigated. The results indicate that combination poling treatment of DC and bipolar pulse poling increases a piezoelectric property and reduces a dielectric constant. It means that this poling technique improves the figure of merit of sensors and harvesters. Maximum DC power from a harvester treated by DC poling after bipolar pulse poling is about five times larger than a one treated by DC poling only.",

author = "N. Moriwaki and T. Kobayashi and Y. Suzuki and N. Makimoto and K. Fujimoto and K. Suzuki and T. Itoh and R. Maeda",

year = "2013",

doi = "10.1088/1742-6596/476/1/012132",

language = "英语",

volume = "476",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

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note = "13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2013 ; Conference date: 03-12-2013 Through 06-12-2013",

}

TY - JOUR

T1 - Influence of bipolar pulse poling technique for piezoelectric vibration energy harvesters using Pb(Zr,Ti)O3 films on 200 mm SOI wafers

AU - Moriwaki, N.

AU - Kobayashi, T.

AU - Suzuki, Y.

AU - Makimoto, N.

AU - Fujimoto, K.

AU - Suzuki, K.

AU - Itoh, T.

AU - Maeda, R.

PY - 2013

Y1 - 2013

N2 - Piezoelectric vibration energy harvester arrays using Pb(Zr,Ti)O 3 thin films on 200 mm SOI wafers were fabricated. In-plane distribution of influence of bipolar pulse poling technique on direct current (DC) power output from the harvesters was investigated. The results indicate that combination poling treatment of DC and bipolar pulse poling increases a piezoelectric property and reduces a dielectric constant. It means that this poling technique improves the figure of merit of sensors and harvesters. Maximum DC power from a harvester treated by DC poling after bipolar pulse poling is about five times larger than a one treated by DC poling only.

AB - Piezoelectric vibration energy harvester arrays using Pb(Zr,Ti)O 3 thin films on 200 mm SOI wafers were fabricated. In-plane distribution of influence of bipolar pulse poling technique on direct current (DC) power output from the harvesters was investigated. The results indicate that combination poling treatment of DC and bipolar pulse poling increases a piezoelectric property and reduces a dielectric constant. It means that this poling technique improves the figure of merit of sensors and harvesters. Maximum DC power from a harvester treated by DC poling after bipolar pulse poling is about five times larger than a one treated by DC poling only.

UR - https://www.scopus.com/pages/publications/84891753960

U2 - 10.1088/1742-6596/476/1/012132

DO - 10.1088/1742-6596/476/1/012132

M3 - 会议文章

AN - SCOPUS:84891753960

SN - 1742-6588

VL - 476

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012132

T2 - 13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2013

Y2 - 3 December 2013 through 6 December 2013

ER -

Influence of bipolar pulse poling technique for piezoelectric vibration energy harvesters using Pb(Zr,Ti)O3 films on 200 mm SOI wafers

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Influence of bipolar pulse poling technique for piezoelectric vibration energy harvesters using Pb(Zr,Ti)O₃ films on 200 mm SOI wafers