@inproceedings{16a4414d7ead4d7bb32d8a715153ced2,
title = "In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity",
abstract = "In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift. The practical testing results indicated the combined scale factor of the proposed sensor can reach more than 4026.5Hz/g. The Allan deviation results showed that the typical zero-bias stability of the self-excited oscillator was about 80ppb, and the resolution of the sensor was about 6.6μg.",
keywords = "MEMS, dual-axis, resonant accelerometer",
author = "Shudong Wang and Weilong Zhu and Yajing Shen and Juan Ren and Xueyong Wei",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 ; Conference date: 23-03-2020 Through 26-03-2020",
year = "2020",
month = mar,
doi = "10.1109/INERTIAL48129.2020.9090093",
language = "英语",
series = "INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
}