TY - JOUR
T1 - Improved Full-Temperature Calibration Method of Metal-Based Quartz Resonant Accelerometers with High Resolution and Low Loss
AU - Zhou, Shengxiang
AU - Xue, Hong
AU - Bai, Bing
AU - Li, Cun
AU - Zhao, Yulong
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2026
Y1 - 2026
N2 - Quartz resonant accelerometers are promising for high-precision inertial navigation because of their high quality factor, high stability and compact size. However, thermal effect has become one of the key factors limiting the achievable performance of high-precision quartz resonant accelerometers. Conventional full-temperature multi-point zero bias and scale factor calibration method based on the four-position tumble test is affected by temperature non-uniformity among tumble positions and insufficient thermal characterization due to sparse temperature points. This study theoretically analyzed the temperature-drift mechanism of metal-based quartz resonant accelerometers and the limitation of conventional calibration method. An improved full-temperature calibration method with high-resolution and low-loss is then proposed. In addition, experimental tests were conducted to compare and analyze the calibration results and full-temperature compensation performance of the two methods. The results indicate that, compared with the conventional method, the proposed method reduces acceleration fluctuations by 77.5%, nearly eliminates the acceleration offset, and improves the full-temperature stability from 151 ppm to 27 ppm. These findings demonstrate the effectiveness of the proposed method for high-accuracy temperature compensation of quartz resonant accelerometers.
AB - Quartz resonant accelerometers are promising for high-precision inertial navigation because of their high quality factor, high stability and compact size. However, thermal effect has become one of the key factors limiting the achievable performance of high-precision quartz resonant accelerometers. Conventional full-temperature multi-point zero bias and scale factor calibration method based on the four-position tumble test is affected by temperature non-uniformity among tumble positions and insufficient thermal characterization due to sparse temperature points. This study theoretically analyzed the temperature-drift mechanism of metal-based quartz resonant accelerometers and the limitation of conventional calibration method. An improved full-temperature calibration method with high-resolution and low-loss is then proposed. In addition, experimental tests were conducted to compare and analyze the calibration results and full-temperature compensation performance of the two methods. The results indicate that, compared with the conventional method, the proposed method reduces acceleration fluctuations by 77.5%, nearly eliminates the acceleration offset, and improves the full-temperature stability from 151 ppm to 27 ppm. These findings demonstrate the effectiveness of the proposed method for high-accuracy temperature compensation of quartz resonant accelerometers.
KW - Full-temperature calibration
KW - Quartz resonant accelerometer
KW - Scale factor
KW - Temperature drift compensation
KW - Zero bias
UR - https://www.scopus.com/pages/publications/105050185129
U2 - 10.1109/LSENS.2026.3727346
DO - 10.1109/LSENS.2026.3727346
M3 - 文章
AN - SCOPUS:105050185129
SN - 2475-1472
JO - IEEE Sensors Letters
JF - IEEE Sensors Letters
ER -