High-throughput and low-cost fabrication of polymer microscanner for lighting applications

A high-throughput and low-cost fabrication process for an optical microscanner is proposed for lighting applications. The process utilizes mold replication and transfer of printed functional layers to form a film. We confirmed that a high-throughput fabrication lasting less than 30 s could be obtained by using a mold with a knife edge. A polymer microscanner with feature size of 0:6× 2mm² was successfully fabricated using our process. The scanner was actuated by magnetic forces generated by an external coil, and the mirror tilt angle was successfully measured by a strain gauge formed by the functional layer transfer. By synchronizing the LED input signal and the polymer scanner tilt angle, the illuminance distribution could be controlled. For example, this distribution could be expanded from 10 to 50° or divided into two separated spots. We believe that our developed process can address new MEMS applications such as commercial lighting.