High-precision magnetically suspended table and its decoupling control

Design, modeling, decoupling control, as well as experiment results of a high-precision magnetically suspended table are presented. Compared with existing designs, the magnetic suspension and the linear drive in our design are electro-magnetically separated, so that the coupling between them is minimized. Presented also are novel designs in the electromagnets and in the arrangement of sensors, which achieves smaller power consumption even without the use of permanent magnets, and maintains redundancy in driving and sensing. This redundancy allows a symmetric structural design that gives uniform (and also improved) noise performance among the control axis.