TY - GEN
T1 - High accuracy measurement of aspherical surface by point diffraction interferometry
AU - Gao, Fen
AU - Jiang, Zhuangde
AU - Feng, Yi
AU - Li, Bing
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/11/26
Y1 - 2014/11/26
N2 - Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.
AB - Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.
UR - https://www.scopus.com/pages/publications/84919485436
U2 - 10.1109/NANO.2014.6968177
DO - 10.1109/NANO.2014.6968177
M3 - 会议稿件
AN - SCOPUS:84919485436
T3 - Proceedings of the IEEE Conference on Nanotechnology
SP - 428
EP - 432
BT - Proceedings of the IEEE Conference on Nanotechnology
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014
Y2 - 18 August 2014 through 21 August 2014
ER -