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GSMBE growth and DCXRD study on InxGa1-xAs/InP strained-layer MQWs in P-i-N configuration

  • Xiaoliang Wang
  • , Dianzhao Sun
  • , Meiying Kong
  • , Xun Hou
  • , Yiping Zeng
  • CAS - Institute of Semiconductors

科研成果: 期刊稿件文章同行评审

摘要

A series of high quality InxGa1-xAs/InP strained-layer multiquantum wells (MQW) in a P-i-N configuration with x varying from 0.39 to 0.68 were made using the home made GSMBE system. Double crystal X-ray diffraction (DCXRD) patterns and their computer simulation were used to determine the structural parameters and indium composition in the well of the samples. The results show that the samples are of high quality and the growth process can be well controlled.

源语言英语
页(从-至)502-507
页数6
期刊Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors
18
7
出版状态已出版 - 7月 1997
已对外发布

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