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Growth of a GaN layer on a glass substrate by metal organic chemical vapor deposition

  • H. X. Wang
  • , T. Wang
  • , M. Lachab
  • , Y. Ishikawa
  • , M. S. Hao
  • , K. Oyama
  • , K. Nishino
  • , S. Sakai
  • , K. Tominaga
  • Tokushima University

科研成果: 期刊稿件文章同行评审

7 引用 (Scopus)

摘要

This paper reports for the first time the successful growth of a single GaN layer on an amorphous glass substrate using metal organic chemical vapor deposition (MOCVD) technique. The layers were characterized by room temperature photoluminescence and X-ray diffraction measurements. In addition, the lateral overgrowth of GaN on this substrate was also tried, which could provide an effective method to obtain high-quality GaN substrates in the near future. In comparison to the overgrowth on sapphire substrate, the lateral overgrowth on our substrate is independent of the mask stripe direction, which could indicate a different growth mechanism.

源语言英语
页(从-至)241-244
页数4
期刊Journal of Crystal Growth
206
3
DOI
出版状态已出版 - 10月 1999
已对外发布

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