TY - JOUR
T1 - Growth and tribological property characterization of diamond-like-carbon films
AU - Zeng, Qunfeng
AU - Yu, Fei
AU - Dong, Guangneng
AU - Mao, Junhong
AU - Lin, Kaisheng
PY - 2013/4
Y1 - 2013/4
N2 - The diamond-like-carbon(DLC)films were deposited by unbalanced magnetron sputtering with C2H2 as the carbon source on high speed steel substrates. The microstructures and tribological properties of the DLC films were characterized with atomic force microscopy, scanning electron microscopy, Raman spectroscopy and X-rayphotoelectron spectroscopy. The preliminary results show that the typical DLC films significantly improve the microstructures and tribological properties of the substrates. For example, the DLC films considerably increased the surface micro-hardness and wear-resistance. The time it takes for the friction coefficient to reach its peak decreases with the increases of the load and sliding velocity in the initial stage of the test. The wear tracks indicated an adhesion wear mechanism.
AB - The diamond-like-carbon(DLC)films were deposited by unbalanced magnetron sputtering with C2H2 as the carbon source on high speed steel substrates. The microstructures and tribological properties of the DLC films were characterized with atomic force microscopy, scanning electron microscopy, Raman spectroscopy and X-rayphotoelectron spectroscopy. The preliminary results show that the typical DLC films significantly improve the microstructures and tribological properties of the substrates. For example, the DLC films considerably increased the surface micro-hardness and wear-resistance. The time it takes for the friction coefficient to reach its peak decreases with the increases of the load and sliding velocity in the initial stage of the test. The wear tracks indicated an adhesion wear mechanism.
KW - Diamond-like carbon films
KW - Structure analysis
KW - Tribological properties
KW - Unbalanced magnetron sputtering
UR - https://www.scopus.com/pages/publications/84877686488
U2 - 10.3969/j.issn.1672-7126.2013.04.16
DO - 10.3969/j.issn.1672-7126.2013.04.16
M3 - 文章
AN - SCOPUS:84877686488
SN - 1672-7126
VL - 33
SP - 377
EP - 381
JO - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
JF - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
IS - 4
ER -