Growth and characterization of ZnO films by laser molecular beam epitaxy

Yongning He; Changchun Zhu; Xun Hou; Jingwen Zhang; Xiaodong Yang; Qing'an Xu; Fanguang Zeng

Growth and characterization of ZnO films by laser molecular beam epitaxy

Yongning He
, Changchun Zhu
, Xun Hou
, Jingwen Zhang
, Xiaodong Yang
, Qing'an Xu
, Fanguang Zeng

电子与信息学部

Xi'an Jiaotong University
CAS - Xi'an Institute of Optics and Precision Mechanics
Henan University

科研成果: 期刊稿件 › 文章 › 同行评审

2 引用（Scopus）

摘要

High quality ZnO films have been successfully grown on (0001) sapphire substrate at low temperatures by laser molecular beam epitaxy (L-MBE). The ZnO ceramic target with a purity better than 99.99%, prepared in the clean environment, was ablated by KrF laser in ultra high vacuum. The as-grown film, characterized with X-ray diffraction (XRD), shows highly C-axis orientated wurtzite structure. High transmittance at the absorption edge was also observed. L-MBE growth mechanism of the ZnO film was tentatively discussed.

源语言	英语
页（从-至）	420-423
页数	4
期刊	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
卷	24
期	6
出版状态	已出版 - 12月 2004

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title = "Growth and characterization of ZnO films by laser molecular beam epitaxy",

abstract = "High quality ZnO films have been successfully grown on (0001) sapphire substrate at low temperatures by laser molecular beam epitaxy (L-MBE). The ZnO ceramic target with a purity better than 99.99\%, prepared in the clean environment, was ablated by KrF laser in ultra high vacuum. The as-grown film, characterized with X-ray diffraction (XRD), shows highly C-axis orientated wurtzite structure. High transmittance at the absorption edge was also observed. L-MBE growth mechanism of the ZnO film was tentatively discussed.",

keywords = "L-MBE growth process, Microelectronics, ZnO ceramic target, ZnO thin film",

author = "Yongning He and Changchun Zhu and Xun Hou and Jingwen Zhang and Xiaodong Yang and Qing'an Xu and Fanguang Zeng",

year = "2004",

month = dec,

language = "英语",

volume = "24",

pages = "420--423",

journal = "Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology",

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TY - JOUR

T1 - Growth and characterization of ZnO films by laser molecular beam epitaxy

AU - He, Yongning

AU - Zhu, Changchun

AU - Hou, Xun

AU - Zhang, Jingwen

AU - Yang, Xiaodong

AU - Xu, Qing'an

AU - Zeng, Fanguang

PY - 2004/12

Y1 - 2004/12

N2 - High quality ZnO films have been successfully grown on (0001) sapphire substrate at low temperatures by laser molecular beam epitaxy (L-MBE). The ZnO ceramic target with a purity better than 99.99%, prepared in the clean environment, was ablated by KrF laser in ultra high vacuum. The as-grown film, characterized with X-ray diffraction (XRD), shows highly C-axis orientated wurtzite structure. High transmittance at the absorption edge was also observed. L-MBE growth mechanism of the ZnO film was tentatively discussed.

AB - High quality ZnO films have been successfully grown on (0001) sapphire substrate at low temperatures by laser molecular beam epitaxy (L-MBE). The ZnO ceramic target with a purity better than 99.99%, prepared in the clean environment, was ablated by KrF laser in ultra high vacuum. The as-grown film, characterized with X-ray diffraction (XRD), shows highly C-axis orientated wurtzite structure. High transmittance at the absorption edge was also observed. L-MBE growth mechanism of the ZnO film was tentatively discussed.

KW - L-MBE growth process

KW - Microelectronics

KW - ZnO ceramic target

KW - ZnO thin film

UR - https://www.scopus.com/pages/publications/13444257511

M3 - 文章

AN - SCOPUS:13444257511

SN - 1672-7126

VL - 24

SP - 420

EP - 423

JO - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

JF - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

IS - 6

ER -

Growth and characterization of ZnO films by laser molecular beam epitaxy

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