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Function-layer-driven surface engineering for high-efficiency and stable secondary electron emission films

  • Xi'an Jiaotong University

科研成果: 期刊稿件文章同行评审

摘要

The modification of MgO thin films through surface engineering has been widely investigated to enhance secondary electron emission (SEE) and air stability. Here, we propose two progressive hierarchical strategies based on Al and Au co-doped MgO thin film, designed as bilayer and trilayer sandwich structures with MgO-based functional layers. The optimized surface bilayer structure achieves a SEE coefficient (SEY) at Ep = 200 eV (δ200) above 4.5 with a low decay rate of ∼5 %. Integrating both strategies, the final surface sandwich structure shows excellent air stability, maintaining δ200 = 4.5 and a decay rate of only 4.25 % after 72 h air exposure. Compared with the previously reported co-doped film with a 2 nm Al2O3 passivation layer (CP2nm), our surface sandwich structure exhibits clear advantages in terms of SEE performance and stability. Specifically, the inital δ200 increases by 12 % at a comparable decay rate, wheras after 72 h of exposure to air, These results demonstrate that the hierarchical sandwich design effectively enhances both SEE performance and air stability, offering a superior strategy for MgO-based electron emission films.

源语言英语
文章编号115063
期刊Vacuum
246
DOI
出版状态已出版 - 3月 2026

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