TY - JOUR
T1 - Function-layer-driven surface engineering for high-efficiency and stable secondary electron emission films
AU - Su, Yue
AU - Li, Jie
AU - Wu, Shengli
AU - Hu, Wenbo
N1 - Publisher Copyright:
© 2026 Elsevier Ltd
PY - 2026/3
Y1 - 2026/3
N2 - The modification of MgO thin films through surface engineering has been widely investigated to enhance secondary electron emission (SEE) and air stability. Here, we propose two progressive hierarchical strategies based on Al and Au co-doped MgO thin film, designed as bilayer and trilayer sandwich structures with MgO-based functional layers. The optimized surface bilayer structure achieves a SEE coefficient (SEY) at Ep = 200 eV (δ200) above 4.5 with a low decay rate of ∼5 %. Integrating both strategies, the final surface sandwich structure shows excellent air stability, maintaining δ200 = 4.5 and a decay rate of only 4.25 % after 72 h air exposure. Compared with the previously reported co-doped film with a 2 nm Al2O3 passivation layer (CP2nm), our surface sandwich structure exhibits clear advantages in terms of SEE performance and stability. Specifically, the inital δ200 increases by 12 % at a comparable decay rate, wheras after 72 h of exposure to air, These results demonstrate that the hierarchical sandwich design effectively enhances both SEE performance and air stability, offering a superior strategy for MgO-based electron emission films.
AB - The modification of MgO thin films through surface engineering has been widely investigated to enhance secondary electron emission (SEE) and air stability. Here, we propose two progressive hierarchical strategies based on Al and Au co-doped MgO thin film, designed as bilayer and trilayer sandwich structures with MgO-based functional layers. The optimized surface bilayer structure achieves a SEE coefficient (SEY) at Ep = 200 eV (δ200) above 4.5 with a low decay rate of ∼5 %. Integrating both strategies, the final surface sandwich structure shows excellent air stability, maintaining δ200 = 4.5 and a decay rate of only 4.25 % after 72 h air exposure. Compared with the previously reported co-doped film with a 2 nm Al2O3 passivation layer (CP2nm), our surface sandwich structure exhibits clear advantages in terms of SEE performance and stability. Specifically, the inital δ200 increases by 12 % at a comparable decay rate, wheras after 72 h of exposure to air, These results demonstrate that the hierarchical sandwich design effectively enhances both SEE performance and air stability, offering a superior strategy for MgO-based electron emission films.
KW - Co-doped MgO film
KW - Reactive magnetron sputtering
KW - Secondary electron emission
KW - Surface engineering
UR - https://www.scopus.com/pages/publications/105026657859
U2 - 10.1016/j.vacuum.2025.115063
DO - 10.1016/j.vacuum.2025.115063
M3 - 文章
AN - SCOPUS:105026657859
SN - 0042-207X
VL - 246
JO - Vacuum
JF - Vacuum
M1 - 115063
ER -