Formation of polymer micro-bump with laser rear-side irradiation and sacrificial layer

Jinyou Shao; Linlin Miao; Yucheng Ding; Bing Hu; Xiangming Li; Ziwei Xie; Qiang Chen

doi:10.1364/ltst.2012.mth4a.19

Formation of polymer micro-bump with laser rear-side irradiation and sacrificial layer

Jinyou Shao
, Linlin Miao
, Yucheng Ding
, Bing Hu
, Xiangming Li
, Ziwei Xie
, Qiang Chen

机械工程学院

Xi'an Jiaotong University

科研成果: 会议稿件 › 论文 › 同行评审

摘要

This article demonstrates a novel method to fabricate micro-bump on polymer surface by the laser rear-side irradiation. In this method, a metal sacrificial layer is prepared between the transparent substrate and the polymer.

源语言	英语
DOI	https://doi.org/10.1364/ltst.2012.mth4a.19
出版状态	已出版 - 2012
活动	Laser and Tera-Hertz Science and Technology, LTST 2012 - Wuhan, 中国期限: 1 11月 2012 → 2 11月 2012

会议

会议	Laser and Tera-Hertz Science and Technology, LTST 2012
国家/地区	中国
市	Wuhan
时期	1/11/12 → 2/11/12

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10.1364/ltst.2012.mth4a.19

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引用此

@conference{bba9fc33f82043d6b0386545c79698f8,

title = "Formation of polymer micro-bump with laser rear-side irradiation and sacrificial layer",

abstract = "This article demonstrates a novel method to fabricate micro-bump on polymer surface by the laser rear-side irradiation. In this method, a metal sacrificial layer is prepared between the transparent substrate and the polymer.",

author = "Jinyou Shao and Linlin Miao and Yucheng Ding and Bing Hu and Xiangming Li and Ziwei Xie and Qiang Chen",

year = "2012",

doi = "10.1364/ltst.2012.mth4a.19",

language = "英语",

note = "Laser and Tera-Hertz Science and Technology, LTST 2012 ; Conference date: 01-11-2012 Through 02-11-2012",

}

TY - CONF

T1 - Formation of polymer micro-bump with laser rear-side irradiation and sacrificial layer

AU - Shao, Jinyou

AU - Miao, Linlin

AU - Ding, Yucheng

AU - Hu, Bing

AU - Li, Xiangming

AU - Xie, Ziwei

AU - Chen, Qiang

PY - 2012

Y1 - 2012

N2 - This article demonstrates a novel method to fabricate micro-bump on polymer surface by the laser rear-side irradiation. In this method, a metal sacrificial layer is prepared between the transparent substrate and the polymer.

AB - This article demonstrates a novel method to fabricate micro-bump on polymer surface by the laser rear-side irradiation. In this method, a metal sacrificial layer is prepared between the transparent substrate and the polymer.

UR - https://www.scopus.com/pages/publications/85088337579

U2 - 10.1364/ltst.2012.mth4a.19

DO - 10.1364/ltst.2012.mth4a.19

M3 - 论文

AN - SCOPUS:85088337579

T2 - Laser and Tera-Hertz Science and Technology, LTST 2012

Y2 - 1 November 2012 through 2 November 2012

ER -

Formation of polymer micro-bump with laser rear-side irradiation and sacrificial layer

摘要

会议

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学术指纹

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