@inproceedings{7ebe23b792624e9ca56dd0bb84186882,
title = "Feasibility study of a pressure sensor based on double-ended tuning fork quartz resonator",
abstract = "This paper aims to examine the feasibility of a novel resonant pressure sensor, which is realized by introducing a double-ended tuning fork (DETF) quartz resonator into a silicon substrate. Theoretical model and finite element simulation results are given to provide support for the scheme. Sensor prototypes are fabricated based on micromachining technologies. Experimental setup for testing is established to detect the resonant frequency, in which an excitation circuit is designed to drive the quartz resonator into vibration. Preliminary experiment results demonstrate that the non-linearity of the sensor is 0.036\%FS while the sensitivity is approximately 452Hz/kPa. The results indicate that this resonant pressure sensor features excellent performances. Therefore, the feasibility of this scheme is basically verified, which provides a solution for low pressure measurement.",
keywords = "micromachining technology, pressure sensor, quartz resonator, resonant",
author = "Rongjun Cheng and Yulong Zhao and Cun Li",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 ; Conference date: 13-04-2014 Through 16-04-2014",
year = "2014",
month = sep,
day = "23",
doi = "10.1109/NEMS.2014.6908825",
language = "英语",
series = "9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "354--357",
booktitle = "9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014",
}