Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering

Xuming Bian; Jingwen Zhang; Zhen Bi; Dong Wang; Xin'An Zhang; Xun Hou

doi:10.1117/1.2939091

Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering

Xuming Bian
, Jingwen Zhang
, Zhen Bi
, Dong Wang
, Xin'An Zhang
, Xun Hou

电子与信息学部

Xi'an Jiaotong University

科研成果: 期刊稿件 › 文章 › 同行评审

7 引用（Scopus）

摘要

ZnO thin films were grown on SiO₂/Si substrates by radio-frequency magnetron sputtering. Based on the ZnO film, a photoconductive metal-semiconductor-metal ultraviolet detector was fabricated by a liftoff technique. Its I-V characteristics were observed at 365nm, and a fast response was observed by illumination with a KrF excimer laser.

源语言	英语
文章编号	064001
期刊	Optical Engineering
卷	47
期	6
DOI	https://doi.org/10.1117/1.2939091
出版状态	已出版 - 2008

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10.1117/1.2939091

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title = "Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering",

abstract = "ZnO thin films were grown on SiO2/Si substrates by radio-frequency magnetron sputtering. Based on the ZnO film, a photoconductive metal-semiconductor-metal ultraviolet detector was fabricated by a liftoff technique. Its I-V characteristics were observed at 365nm, and a fast response was observed by illumination with a KrF excimer laser.",

keywords = "ZnO film, metal-semiconductor-metal structures, photoconductive ultraviolet detector",

author = "Xuming Bian and Jingwen Zhang and Zhen Bi and Dong Wang and Xin'An Zhang and Xun Hou",

year = "2008",

doi = "10.1117/1.2939091",

language = "英语",

volume = "47",

journal = "Optical Engineering",

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publisher = "SPIE",

number = "6",

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TY - JOUR

T1 - Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering

AU - Bian, Xuming

AU - Zhang, Jingwen

AU - Bi, Zhen

AU - Wang, Dong

AU - Zhang, Xin'An

AU - Hou, Xun

PY - 2008

Y1 - 2008

N2 - ZnO thin films were grown on SiO2/Si substrates by radio-frequency magnetron sputtering. Based on the ZnO film, a photoconductive metal-semiconductor-metal ultraviolet detector was fabricated by a liftoff technique. Its I-V characteristics were observed at 365nm, and a fast response was observed by illumination with a KrF excimer laser.

AB - ZnO thin films were grown on SiO2/Si substrates by radio-frequency magnetron sputtering. Based on the ZnO film, a photoconductive metal-semiconductor-metal ultraviolet detector was fabricated by a liftoff technique. Its I-V characteristics were observed at 365nm, and a fast response was observed by illumination with a KrF excimer laser.

KW - ZnO film

KW - metal-semiconductor-metal structures

KW - photoconductive ultraviolet detector

UR - https://www.scopus.com/pages/publications/80855164765

U2 - 10.1117/1.2939091

DO - 10.1117/1.2939091

M3 - 文章

AN - SCOPUS:80855164765

SN - 0091-3286

VL - 47

JO - Optical Engineering

JF - Optical Engineering

IS - 6

M1 - 064001

ER -

Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering

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