Fabrication of single crystal diamond microchannels for micro-electromechanical systems

J. Fu; T. F. Zhu; M. H. Zhang; X. Zhang; F. N. Li; Z. C. Liu; G. A. Denu; Y. F. Wang; D. Zhao; G. Q. Shao; X. H. Chang; W. Wang; J. W. Zhang; H. X. Wang; J. J. Wang; X. Hou

doi:10.1016/j.diamond.2017.09.016

Fabrication of single crystal diamond microchannels for micro-electromechanical systems

J. Fu
, T. F. Zhu
, M. H. Zhang
, X. Zhang
, F. N. Li
, Z. C. Liu
, G. A. Denu
, Y. F. Wang
, D. Zhao
, G. Q. Shao
, X. H. Chang
, W. Wang
, J. W. Zhang
, H. X. Wang
, J. J. Wang
, X. Hou

电子与信息学部

Xi'an Jiaotong University
Hebei Semiconductor Research Institute

科研成果: 期刊稿件 › 文章 › 同行评审

15 引用（Scopus）

摘要

Fabrication of single crystal diamond microchannels on HPHT diamond substrate has been carried out successfully. Firstly, tungsten film was patterned on diamond substrate surface by conventional photolithography and magnetron sputtering methods. Secondly, single crystal diamond epitaxial layer was grown on the surface of the patterned substrate by microwave plasma chemical vapor deposition system. Then the tungsten film was etched out by acid to form microchannel. Finally, different color liquid was introduced to check the hollow of microchannels. The morphology of the microchannels has been investigated by optical microscope, scanning electron microscope and atomic force microscope. The crystallinity was evaluated by X-ray diffraction systems and Raman spectroscope technology.

源语言	英语
页（从-至）	64-68
页数	5
期刊	Diamond and Related Materials
卷	80
DOI	https://doi.org/10.1016/j.diamond.2017.09.016
出版状态	已出版 - 1 11月 2017

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10.1016/j.diamond.2017.09.016

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Fu, J., Zhu, T. F., Zhang, M. H., Zhang, X., Li, F. N., Liu, Z. C., Denu, G. A., Wang, Y. F., Zhao, D., Shao, G. Q., Chang, X. H., Wang, W., Zhang, J. W., Wang, H. X., Wang, J. J., & Hou, X. (2017). Fabrication of single crystal diamond microchannels for micro-electromechanical systems. Diamond and Related Materials, 80, 64-68. https://doi.org/10.1016/j.diamond.2017.09.016

@article{04e2b3d544d24567b0275d6df53ef6e3,

title = "Fabrication of single crystal diamond microchannels for micro-electromechanical systems",

abstract = "Fabrication of single crystal diamond microchannels on HPHT diamond substrate has been carried out successfully. Firstly, tungsten film was patterned on diamond substrate surface by conventional photolithography and magnetron sputtering methods. Secondly, single crystal diamond epitaxial layer was grown on the surface of the patterned substrate by microwave plasma chemical vapor deposition system. Then the tungsten film was etched out by acid to form microchannel. Finally, different color liquid was introduced to check the hollow of microchannels. The morphology of the microchannels has been investigated by optical microscope, scanning electron microscope and atomic force microscope. The crystallinity was evaluated by X-ray diffraction systems and Raman spectroscope technology.",

keywords = "MEMS, Microchannel, Single crystal diamond",

author = "J. Fu and Zhu, \{T. F.\} and Zhang, \{M. H.\} and X. Zhang and Li, \{F. N.\} and Liu, \{Z. C.\} and Denu, \{G. A.\} and Wang, \{Y. F.\} and D. Zhao and Shao, \{G. Q.\} and Chang, \{X. H.\} and W. Wang and Zhang, \{J. W.\} and Wang, \{H. X.\} and Wang, \{J. J.\} and X. Hou",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2017",

month = nov,

day = "1",

doi = "10.1016/j.diamond.2017.09.016",

language = "英语",

volume = "80",

pages = "64--68",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Fabrication of single crystal diamond microchannels for micro-electromechanical systems

AU - Fu, J.

AU - Zhu, T. F.

AU - Zhang, M. H.

AU - Zhang, X.

AU - Li, F. N.

AU - Liu, Z. C.

AU - Denu, G. A.

AU - Wang, Y. F.

AU - Zhao, D.

AU - Shao, G. Q.

AU - Chang, X. H.

AU - Wang, W.

AU - Zhang, J. W.

AU - Wang, H. X.

AU - Wang, J. J.

AU - Hou, X.

PY - 2017/11/1

Y1 - 2017/11/1

N2 - Fabrication of single crystal diamond microchannels on HPHT diamond substrate has been carried out successfully. Firstly, tungsten film was patterned on diamond substrate surface by conventional photolithography and magnetron sputtering methods. Secondly, single crystal diamond epitaxial layer was grown on the surface of the patterned substrate by microwave plasma chemical vapor deposition system. Then the tungsten film was etched out by acid to form microchannel. Finally, different color liquid was introduced to check the hollow of microchannels. The morphology of the microchannels has been investigated by optical microscope, scanning electron microscope and atomic force microscope. The crystallinity was evaluated by X-ray diffraction systems and Raman spectroscope technology.

AB - Fabrication of single crystal diamond microchannels on HPHT diamond substrate has been carried out successfully. Firstly, tungsten film was patterned on diamond substrate surface by conventional photolithography and magnetron sputtering methods. Secondly, single crystal diamond epitaxial layer was grown on the surface of the patterned substrate by microwave plasma chemical vapor deposition system. Then the tungsten film was etched out by acid to form microchannel. Finally, different color liquid was introduced to check the hollow of microchannels. The morphology of the microchannels has been investigated by optical microscope, scanning electron microscope and atomic force microscope. The crystallinity was evaluated by X-ray diffraction systems and Raman spectroscope technology.

KW - MEMS

KW - Microchannel

KW - Single crystal diamond

UR - https://www.scopus.com/pages/publications/85042680468

U2 - 10.1016/j.diamond.2017.09.016

DO - 10.1016/j.diamond.2017.09.016

M3 - 文章

AN - SCOPUS:85042680468

SN - 0925-9635

VL - 80

SP - 64

EP - 68

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

Fabrication of single crystal diamond microchannels for micro-electromechanical systems

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