摘要
High edge definition of a scale grating is the basic prerequisite for high measurement accuracy of optical encoders. This paper presents a novel fabrication method of steel tape gratings using graphene oxide nanoparticles as anti-reflective grating strips. Roll-to-roll nanoimprint lithography is adopted to manufacture the steel tape with hydrophobic and hydrophilic pattern arrays. Self-assembly technology is employed to obtain anti-reflective grating strips by depositing the graphene oxide nanoparticles on hydrophobic regions. A thin SiO2 coating is deposited on the grating to protect the grating strips. Experimental results confirm that the proposed fabrication process enables a higher edge definition in making steel-tape gratings, and the new steel tape gratings offer better performance than conventional gratings.
| 源语言 | 英语 |
|---|---|
| 文章编号 | 105006 |
| 期刊 | Review of Scientific Instruments |
| 卷 | 88 |
| 期 | 10 |
| DOI | |
| 出版状态 | 已出版 - 1 10月 2017 |
学术指纹
探究 'Fabrication of high edge-definition steel-tape gratings for optical encoders' 的科研主题。它们共同构成独一无二的指纹。引用此
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver