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Fabrication of high edge-definition steel-tape gratings for optical encoders

  • Guoyong Ye
  • , Hongzhong Liu
  • , Jiawei Yan
  • , Yaowen Ban
  • , Shanjin Fan
  • , Yongsheng Shi
  • , Lei Yin

科研成果: 期刊稿件文章同行评审

5 引用 (Scopus)

摘要

High edge definition of a scale grating is the basic prerequisite for high measurement accuracy of optical encoders. This paper presents a novel fabrication method of steel tape gratings using graphene oxide nanoparticles as anti-reflective grating strips. Roll-to-roll nanoimprint lithography is adopted to manufacture the steel tape with hydrophobic and hydrophilic pattern arrays. Self-assembly technology is employed to obtain anti-reflective grating strips by depositing the graphene oxide nanoparticles on hydrophobic regions. A thin SiO2 coating is deposited on the grating to protect the grating strips. Experimental results confirm that the proposed fabrication process enables a higher edge definition in making steel-tape gratings, and the new steel tape gratings offer better performance than conventional gratings.

源语言英语
文章编号105006
期刊Review of Scientific Instruments
88
10
DOI
出版状态已出版 - 1 10月 2017

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