@inproceedings{4967517aa246439ca7b4c83ef9d35ce6,
title = "Fabrication of 3D solenoid microcoils in silica glass by femtosecond laser wet etch and microsolidics",
abstract = "This paper reports a flexible fabrication method for 3D solenoid microcoils in silica glass. The method consists of femtosecond laser wet etching (FLWE) and microsolidics process. The 3D microchannel with high aspect ratio is fabricated by an improved FLWE method. In the microsolidics process, an alloy was chosen as the conductive metal. The microwires are achieved by injecting liquid alloy into the microchannel, and allowing the alloy to cool and solidify. The alloy microwires with high melting point can overcome the limitation of working temperature and improve the electrical property. The geometry, the height and diameter of microcoils were flexibly fabricated by the pre-designed laser writing path, the laser power and etching time. The 3D microcoils can provide uniform magnetic field and be widely integrated in many magnetic microsystems..",
keywords = "3D solenoid microcoils, femtosecond laser, micro-nano manufacturing, silica glass, wet etching",
author = "Xiangwei Meng and Qing Yang and Feng Chen and Chao Shan and Keyin Liu and Yanyang Li and Hao Bian and Guangqing Du and Xun Hou",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; International Conference on Photonics and Optical Engineering, icPOE 2014 ; Conference date: 13-10-2014 Through 15-10-2014",
year = "2015",
doi = "10.1117/12.2075880",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Weiguo Liu and Anand Asundi and Chunmin Zhang and Ailing Tian",
booktitle = "International Conference on Photonics and Optical Engineering, icPOE 2014",
}