@inproceedings{539876cfd3344998820bcf4d2daa84b3,
title = "Fabrication and performance analysis of PMMA substrate diffuser/nozzle micro-pump by CNC milling machine",
abstract = "A new low cost high performance PMMA micropump, developed for microfluidic system, is presented. According to the orifice flow theory, a diffuser/nozzle structure is fabricated with precision milling process, and packaged with the film-sealing at the condition of thermal bonding process. The size parameter of the diffuser/nozzle structure is 2.5mm *150μm, 8° conical angle, the volume of PMMA micropump is 14 × 14 × 2.5 mm 3. And experimental results show that the PMMA micropump can produce a maximum back pressure of 1906.1Pa and a maximum flow rate of 564μL/min under 220 V, 500Hz squired wave power supply.",
keywords = "CNC milling, Diffuser/nozzle elements, Microfluidic system, PMMA micropump",
author = "Tian Li and Wang Wei and Liu Xiaowei and Zhang Ying and Ji Shuyi",
year = "2009",
language = "英语",
isbn = "0878493395",
series = "Advanced Materials Research",
pages = "198--201",
booktitle = "Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT",
note = "Micro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT ; Conference date: 19-11-2008 Through 22-11-2008",
}