Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

Duckbong Seo; Sunghoon Jung; Stephen J. Lombardo; Z. C. Feng; J. K. Chen; Yuwen Zhang

doi:10.1016/j.sna.2010.11.013

Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

Duckbong Seo
, Sunghoon Jung
, Stephen J. Lombardo
, Z. C. Feng
, J. K. Chen
, Yuwen Zhang

University of Missouri

科研成果: 期刊稿件 › 文章 › 同行评审

51 引用（Scopus）

摘要

In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.

源语言	英语
页（从-至）	250-255
页数	6
期刊	Sensors and Actuators A: Physical
卷	165
期	2
DOI	https://doi.org/10.1016/j.sna.2010.11.013
出版状态	已出版 - 2月 2011
已对外发布	是

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title = "Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors",

abstract = "In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.",

keywords = "Ceramic thin film, Heat flux sensor, Polymer derived ceramics",

author = "Duckbong Seo and Sunghoon Jung and Lombardo, \{Stephen J.\} and Feng, \{Z. C.\} and Chen, \{J. K.\} and Yuwen Zhang",

year = "2011",

month = feb,

doi = "10.1016/j.sna.2010.11.013",

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AU - Seo, Duckbong

AU - Jung, Sunghoon

AU - Lombardo, Stephen J.

AU - Feng, Z. C.

AU - Chen, J. K.

AU - Zhang, Yuwen

PY - 2011/2

Y1 - 2011/2

N2 - In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.

AB - In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.

KW - Ceramic thin film

KW - Heat flux sensor

KW - Polymer derived ceramics

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2

ER -

Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

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