@inproceedings{43193c6f1d0449ec80c9b485906bbaeb,
title = "Fabrication and characterization ofnano-scale lines through anodic porous alumina membrane",
abstract = "Anodic Porous alumina membranes are fabricated with different pore sizes through second oxide technique by changing the acid electrolyte and the anodization voltage. The pore diameter value and interpore distance are evaluated through SEM images. Nanostructure patterns with nanometer scale lines can be obtained on the cleaved cross-section of porous alumina membrane. Nano CD (NCD) Iinewidth standard product lines are prepared in this way. The Iinewidth roughness (LWR) and line edge roughness (LER) have been evaluated by analyzing top-down scanning electron microscope (SEM) images off-line using image processing and analysis technology. The average Iinewidth is less than 40 nm and the LWR and LER are estimated.",
keywords = "Anodic porous alumina, Image analysis, Line edge rroughness, Llinewidth, Scanning eelectrochemical microscopy (SEM)",
author = "Han, \{Guo Q.\} and Jiang, \{Zhuang D.\} and Jing, \{Wei X.\} and Wang, \{Hai R.\} and Sun, \{Guo L.\} and ZhU, \{Ming Z.\}",
year = "2009",
doi = "10.1109/NEMS.2009.5068680",
language = "英语",
isbn = "9781424446308",
series = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",
pages = "722--725",
booktitle = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",
note = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 ; Conference date: 05-01-2009 Through 08-01-2009",
}