Fabrication and characteristics of BaTi_0.85Sn _0.15O₃ thin films on tin doped indium oxide/glass substrate

This paper reports the correlation between the microstructure and the physical properties of transparent BaTi_0.85Sn_0.15O ₃ (BTS) thin films with thicknesses of 90-360 nm by radio frequency magnetron sputtering on the tin doped indium oxide (ITO)/glass substrate. All of the BTS/ITO/glass samples have relatively high optical transparency with over 75% in the visible light region. The dielectric constant and tunability of BTS films increase with thickness due to comparatively better crystallinity. The thicker BTS film is observed in an inter-diffusion between BTS film and ITO electrode from the result of secondary ion mass spectrometry depth profiling and then shown in a higher leakage current density.