@inproceedings{5e77a90cc3b94523bf1293d03273dcb9,
title = "Experimental Study of pre-Stressed Micromechanical anti-Spring Structures",
abstract = "This paper presents a comparison study of asymmetrical and symmetrical anti-spring structure for MEMS inertial sensors. Positive and negative pre-stressed voltages were introduced to study the system's response. The simulation in COMSOL shows the 3-spring has a higher sensitivity. In the positive pre-stressed range, both the 3-spring and 4-spring systems show good linearity with the preload V-\{p - \}\textasciicircum{}2 and are respectively, -9ppm/V2, -1.83ppm/V2 with R2 > 0.999. In the negative prestressed range, the 4-spring systems also show good linearity with preload V-\{p - \}\textasciicircum{}2 and are -2.85ppm/V2 while the 3-spring system's frequency shows quadratic with V-\{p - \}\textasciicircum{}2. The special performance determines the choice of the type of anti-spring structure due to the application requirements.",
keywords = "MEMS anti-spring, frequency drift, inertial sensor, pre-stressed voltage tuning",
author = "Hongcai Zhang and Yuxing Duan and Yang Gao and Xueyong Wei",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 18th IEEE Sensors, SENSORS 2019 ; Conference date: 27-10-2019 Through 30-10-2019",
year = "2019",
month = oct,
doi = "10.1109/SENSORS43011.2019.8956552",
language = "英语",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings",
}