Enhanced Vibration Energy Harvesting Through Multilayer Textured Pb(Mg_1/3Nb_2/3)O₃-PbZrO₃-PbTiO₃Piezoelectric Ceramics

High-performance low-cost multilayer textured Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 (PMN-PZT) piezoelectric ceramic benders were fabricated by combining templated grain growth (TGG) and low-temperature co-firing ceramics (LTCC) process. The d×g values of textured samples were 700-800% higher than that of the random counterpart, which results in 500-600% increase in the output power from vibration energy harvesting. The output power and power density of tri-layer textured sample at the acceleration of 0.43 g were measured to be 903 μW and 15.5 mW/cm3, respectively. The results demonstrate that the multilayer structure results in an increase in output current and a decrease in the matching resistive load.