@inproceedings{2e5404f59dfc4bc1a49681248949eee3,
title = "Electron emission properties of cold cathode based on silicon-rich silicon dioxide films prepared by magnetron reaction sputtering",
abstract = "Silicon-rich silicon dioxide (SRSO) films were formed through deposition of SiOx films by magnetron reaction sputtering together-with subsequent rapid temperature annealing treatment. The emission efficiency and emission current density of a cold cathode based on SRSO film reach 10.88\% and 25.78μA/cm2 at the applied voltage of 19V.",
keywords = "Electron emission property, Magnetron reaction sputtering, Silicon-rich silicon dioxide films",
author = "Wei Zhao and Mengyang Zhou and Wenbo Hu",
note = "Publisher Copyright: {\textcopyright} 2016 Society for Information Display. All rights reserved.; 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016 ; Conference date: 07-12-2016 Through 09-12-2016",
year = "2016",
language = "英语",
series = "23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016",
publisher = "Society for Information Display",
pages = "400--403",
booktitle = "23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016",
}