Effects of anisotropy of single crystal silicon on the vibration properties of disk-type MEMS resonators

Disk-type resonators employing in-plane resonant modes have a great impact on the application for high-sensitive mass sensing because of the high quality factor (Q) in atmospheric pressure. In this paper, we had fabricated disk-type resonators for two types of in-plane vibration modes with single crystal silicon (SCS), and the frequency properties were experimentally measured. Furthermore, modal analyses have been performed using finite element method for the structure model of the disk-type resonators under the conditions with different crystal orientations of SCS. We have examined the effects of the crystal orientation of SCS on the frequency properties of disk-type resonators for two types of vibration modes by the experimental and numerical analytical methods.