Effect of poly(vinyl acetate) on structure and property of bismuth-doped strontium titanate thin films derived by sol-gel method

Bismuth-doped strontium titanate thin films with pure perovskite phase have been successfully deposited on Pt (1 1 1)/Ti/SiO₂/Si substrate by polymer-assisted sol-gel method. Poly(vinyl acetate) (PVAc) in precursor solution promoted the formation of perovskite phase during the heat treatment. SEM results revealed an increasing thickness from 40 to 80 nm every single layer and a porous structure with the addition of PVAc. The addition of polymer made the dielectric constant decrease from 140 to 40 and the tunability slightly increase compared with films without polymer in precursor.