Effect of misalignment and rarefaction effect on the comprehensive characteristic of MEMS gas bearing

Purpose: Owing to the development of the smaller-sized rotational machinery, the demand for the high-speed and low-resistance gas bearing increases rapidly. The research of micro gas bearing in the condition of rarefied gas state is still not satisfied. Therefore, the purpose of this paper is to present a numerical investigation of the effect of misalignment and rarefaction effect on the comprehensive performance of micro-electrical-mechanical system (MEMS) gas bearing. Design/methodology/approach: The Fukui and Kaneko model is expanded to 2D solution domain to describe the flow field parameters. The finite element method is used to discretize the equation. Newton–Raphson method is used to solve the nonlinear equations for the static performance of gas bearing, and partial deviation method is adopted for the solution of dynamic equations. Findings: The static and dynamic characteristics of MEMS gas bearing are calculated, and the comparison is made to study the influence of rarefaction effect and misalignment. The results show that the rarefaction effect will decrease bearing load capacity compared with traditional solution of Reynolds equation, and the misalignment will reduce the stability of bearing. The influence of misalignment on gas film thickness is also analyzed in this paper. Originality/value: The investigation of this paper emerges the change regularity of comprehensive performance of MEMS gas bearing considering rarefaction effect and misalignment, which provides a reference for the actual manufacturing of MEMS gas bearing and for the safety operation of micro dynamic machinery. Peer review: The peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-01-2020-0023/