Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film

Wenjun Wang; Bing Hu; Xuesong Mei; Bin Liu; Zibao Wang

doi:10.1364/ltst.2012.mf2c.4

Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film

Wenjun Wang
, Bing Hu
, Xuesong Mei
, Bin Liu
, Zibao Wang

机械工程学院

Xi'an Jiaotong University

科研成果: 会议稿件 › 论文 › 同行评审

摘要

In this paper, laser rear-side ablation of metallic films with the sacrificial layer is proposed. The effect of laser fluence on the sacrificial layer-polymer is investigated. Micro-lens arrays are fabricated on the polymer surface.

源语言	英语
DOI	https://doi.org/10.1364/ltst.2012.mf2c.4
出版状态	已出版 - 2012
活动	Laser and Tera-Hertz Science and Technology, LTST 2012 - Wuhan, 中国期限: 1 11月 2012 → 2 11月 2012

会议

会议	Laser and Tera-Hertz Science and Technology, LTST 2012
国家/地区	中国
市	Wuhan
时期	1/11/12 → 2/11/12

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10.1364/ltst.2012.mf2c.4

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@conference{0025cd5faa2a46b981a0a74fbbcf32ae,

title = "Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film",

abstract = "In this paper, laser rear-side ablation of metallic films with the sacrificial layer is proposed. The effect of laser fluence on the sacrificial layer-polymer is investigated. Micro-lens arrays are fabricated on the polymer surface.",

author = "Wenjun Wang and Bing Hu and Xuesong Mei and Bin Liu and Zibao Wang",

year = "2012",

doi = "10.1364/ltst.2012.mf2c.4",

language = "英语",

note = "Laser and Tera-Hertz Science and Technology, LTST 2012 ; Conference date: 01-11-2012 Through 02-11-2012",

}

TY - CONF

T1 - Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film

AU - Wang, Wenjun

AU - Hu, Bing

AU - Mei, Xuesong

AU - Liu, Bin

AU - Wang, Zibao

PY - 2012

Y1 - 2012

N2 - In this paper, laser rear-side ablation of metallic films with the sacrificial layer is proposed. The effect of laser fluence on the sacrificial layer-polymer is investigated. Micro-lens arrays are fabricated on the polymer surface.

AB - In this paper, laser rear-side ablation of metallic films with the sacrificial layer is proposed. The effect of laser fluence on the sacrificial layer-polymer is investigated. Micro-lens arrays are fabricated on the polymer surface.

UR - https://www.scopus.com/pages/publications/85085718681

U2 - 10.1364/ltst.2012.mf2c.4

DO - 10.1364/ltst.2012.mf2c.4

M3 - 论文

AN - SCOPUS:85085718681

T2 - Laser and Tera-Hertz Science and Technology, LTST 2012

Y2 - 1 November 2012 through 2 November 2012

ER -

Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film

摘要

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